Deposition mechanism of gold by thermal evaporation: approach by charged cluster model

Barnes, Mark C., Kim, Doh-Y., Ahn, Hyo S., Lee, Chang O., and Hwang, Nong M. (2000) Deposition mechanism of gold by thermal evaporation: approach by charged cluster model. Journal of Crystal Growth, 213 (1-2). pp. 83-92.

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The charged cluster model states that chemical vapor deposition (CVD) begins with gas-phase nucleation of charged clusters followed by cluster deposition on a substrate surface to form a thin film. Gold deposition by thermal evaporation was studied in a two-chambered CVD system in order to determine if this mechanism applies to the present case. The presence of nanometer-sized gold clusters was confirmed by transmission electron microscopy (TEM). The charge on the primary clusters was found to be positive. Smaller clusters were found to be amorphous and combined with clusters already deposited on a substrate surface to form larger amorphous clusters on the surface. Larger clusters were also observed by TEM to form after 120 and 300 s. These clusters exhibited a lattice structure and may have grown by attachment of small clusters in the gas phase.

Item ID: 38187
Item Type: Article (Research - C1)
ISSN: 1873-5002
Keywords: gold; evaporation; thin film; clusters; deposition
Funders: Korea Ministry of Science and Technology
Date Deposited: 09 Apr 2015 04:40
FoR Codes: 09 ENGINEERING > 0912 Materials Engineering > 091207 Metals and Alloy Materials @ 50%
10 TECHNOLOGY > 1007 Nanotechnology > 100712 Nanoscale Characterisation @ 50%
SEO Codes: 97 EXPANDING KNOWLEDGE > 970102 Expanding Knowledge in the Physical Sciences @ 100%
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