Aluminum doped zinc oxide sputtering targets obtained from nanostructured powders: processing and application

Neves, Nuno, Barros, Raquel, Antunes, Elsa, Calado, Joao, Fortunato, Elvira, Martins, Rodrigo, and Ferreira, Isabel (2012) Aluminum doped zinc oxide sputtering targets obtained from nanostructured powders: processing and application. Journal of the European Ceramic Society, 32 (16). pp. 4381-4391.

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This work reports the production of ceramic targets based on nanostructured Al-doped ZnO (AZO) powders for sputtering applications. The nanostructured powder is obtained by a new patented process based on the detonation of an emulsion containing both Zn and Al metal precursors in the final proportion of 98:2 wt% (ZnO:Al₂O₃), through which the Al contains is highly uniform distributed over ZnO. Due to the nanostructured powder characteristics, the targets can be sintered at substantially lower temperatures (1150–1250 °C) by conventional sintering, contributing to production costs reduction of ceramic targets and consequently the costs of photovoltaic and displays industries. Electrical resistivity values around 3.0–7.0 × 10⁻³ Ω cm have been obtained depending on final microstructure of the targets. The electro-optical properties of the films produced at room temperature with thicknesses around 360 nm, besides being highly uniform exhibit a resistivity of about 1 × 10⁻³ Ω cm and a transmittance in the visible range above 90%.

Item ID: 59877
Item Type: Article (Research - C1)
ISSN: 1873-619x
Keywords: Aluminum doped zinc oxide (AZO); Electrical conductivity; Sintering; Final microstructure; Films
Copyright Information: © 2012 Elsevier Ltd. All rights reserved.
Funders: Portuguese Agency of Innovation (ADI), European Commission (EC), Portuguese Science Foundation (PSF)
Projects and Grants: ADI QREN/3435-Nanoxides, EC INVISIBLE ERC no. 228144, PSF Pest-C/CTM/LA0025/2011
Date Deposited: 27 Aug 2019 02:16
FoR Codes: 09 ENGINEERING > 0912 Materials Engineering > 091203 Compound Semiconductors @ 50%
09 ENGINEERING > 0910 Manufacturing Engineering > 091099 Manufacturing Engineering not elsewhere classified @ 50%
SEO Codes: 86 MANUFACTURING > 8610 Ceramics, Glass and Industrial Mineral Products > 861002 Ceramics @ 100%
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