Electron transport coefficients in O2 magnetron discharges
White, R.D., Robson, R.E., Ness, K.F., and Makabe, T. (2005) Electron transport coefficients in O2 magnetron discharges. Journal of Physics D: applied physics, 38 (7). pp. 997-1004.
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Abstract
Electron transport coefficients required for the modelling of bulk electron transport in an O2 magnetron discharge are calculated from solution of the non-conservative Boltzmann equation. The influence on the transport coefficients (rate coefficients, drift velocity vector elements, diffusion tensor elements) of the electric and magnetic field strengths and their orientation with respect to each other have been systematically investigated over ranges consistent with practical operation. The results represent the first multi-term solution of the non-conservative Boltzmann's equation for electric and magnetic fields at arbitrary orientations.
| Item ID: | 4543 |
|---|---|
| Item Type: | Article (Research - C1) |
| ISSN: | 1361-6463 |
| Keywords: | Boltzmann equation; electron swarms |
| Date Deposited: | 12 Jun 2009 04:57 |
| FoR Codes: | 02 PHYSICAL SCIENCES > 0202 Atomic, Molecular, Nuclear, Particle and Plasma Physics > 020201 Atomic and Molecular Physics @ 50% 02 PHYSICAL SCIENCES > 0202 Atomic, Molecular, Nuclear, Particle and Plasma Physics > 020204 Plasma Physics; Fusion Plasmas; Electrical Discharges @ 50% |
| SEO Codes: | 97 EXPANDING KNOWLEDGE > 970102 Expanding Knowledge in the Physical Sciences @ 100% |
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