Lee, Beom S., Barnes, Mark C., Kim, Doh-Y., and Hwang, Nong M. (2002) Spontaneous generation of charged clusters of a few nanometers during thermal evaporation of copper. Journal of Crystal Growth, 234 (2-3). pp. 599-602.

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Abstract

Charged copper clusters of a few nanometers were spontaneously generated under typical copper thin film processing by evaporation at 1573 K. The deposition behavior of these clusters was drastically influenced under an electric field. After deposition for 10 s with a bias of +200, 0, and -200 V applied to the substrate, the number density of clusters was negligible on a positively biased substrate but ~1010 mm−2 on neutral and negatively biased substrates. After deposition for 5 min, the film thickness was 10, 100 and 120 nm on positive, neutral and negative substrates, respectively.

Item ID:	38185
Item Type:	Article (Research - C1)
ISSN:	1873-5002
Keywords:	A1. nanostructure; A3. ohysical vapor deposition processes; B1. metals
Funders:	Korea Ministry of Science andTechnology
Date Deposited:	09 Apr 2015 04:11
FoR Codes:	10 TECHNOLOGY > 1007 Nanotechnology > 100706 Nanofabrication, Growth and Self Assembly @ 40% 02 PHYSICAL SCIENCES > 0204 Condensed Matter Physics > 020401 Condensed Matter Characterisation Technique Development @ 30% 02 PHYSICAL SCIENCES > 0204 Condensed Matter Physics > 020406 Surfaces and Structural Properties of Condensed Matter @ 30%
SEO Codes:	97 EXPANDING KNOWLEDGE > 970110 Expanding Knowledge in Technology @ 50% 97 EXPANDING KNOWLEDGE > 970101 Expanding Knowledge in the Mathematical Sciences @ 50%
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