Current developments in contactless measurements of high quality materials for microelectronics and nanotechnology employing dielectric resonator techniques

Krupka, Jerzy, and Mazierska, Janina (2011) Current developments in contactless measurements of high quality materials for microelectronics and nanotechnology employing dielectric resonator techniques. In: Proceedings of the 2011 IEEE Region 10 Conference, pp. 1126-1130. From: TENCON 2011: 2011 IEEE Region 10 Conference, 22-24 November 2011, Bali, Indonesia.

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Abstract

Progress in Microelectronics and Nanotechnology is determined by advancement in developing and characterization of novel materials. In this paper recent developments in nondestructive measurements of high quality semiconductors, conducting polymers, graphene and metamaterials are presented.

Item ID: 19631
Item Type: Conference Item (Refereed Research Paper - E1)
Keywords: superconductors, microwave measurements, dielectric resonators, resistivity mapping, semiconductors, graphene, metamaterials, graphen, sheet resistance, conductivity
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ISBN: 978-1-4577-0256-3
Date Deposited: 22 Feb 2012 02:05
FoR Codes: 09 ENGINEERING > 0906 Electrical and Electronic Engineering > 090699 Electrical and Electronic Engineering not elsewhere classified @ 70%
09 ENGINEERING > 0912 Materials Engineering > 091299 Materials Engineering not elsewhere classified @ 30%
SEO Codes: 86 MANUFACTURING > 8615 Instrumentation > 861503 Scientific Instruments @ 100%
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