Electron transport coefficients in CF4 magnetized plasma discharges

Dujko, S., Raspopović, Z.M., White, R.D., Ness, K.F., Robson, R.E., and Petrović, Z.Lj. (2006) Electron transport coefficients in CF4 magnetized plasma discharges. In: Proceedings of 23rd Summer School and International Symposium on the Physics of Ionized Gases, pp. 131-134. From: 23rd Summer School and International Symposium on the Physics of Ionized Gases, 28 August - 1 September 2006, National Park Kopaonik, Serbia.

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Abstract

Electron transport coefficients for electron swarms in carbon tetrafluoride (CF4) in the presence of uniform static electric and magnetic fields crossed at arbitrary angles to each other are calculated using a Monte Carlo simulation technique. We focus on the way in which the transport coefficients are influenced by electric and magnetic field strengths and the angle between the fields. The investigation has resulted in a database of transport data which is applicable for a wide range of potential applications, although we focused upon the provision and correct implementation of swarm data within the fluid modeling of a magnetron or inductively coupled plasma discharges.

Item ID: 4323
Item Type: Conference Item (Refereed Research Paper - E1)
Keywords: Monte Carlo simulation; Boltzmann equation; electron swarms; plasma discharge modelling
ISBN: 978-0-7354-0377-2
Date Deposited: 15 Jun 2009 23:50
SEO Codes: 97 EXPANDING KNOWLEDGE > 970102 Expanding Knowledge in the Physical Sciences @ 100%
Downloads: Total: 4
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