Microwave and RF methods of contactless mapping of the sheet resistance and the complex permittivity of conductive materials and semiconductors

Krupka, Jerzy, Nguyen, Danh, and Mazierska, Janina (2011) Microwave and RF methods of contactless mapping of the sheet resistance and the complex permittivity of conductive materials and semiconductors. Measurement Science and Technology, 22 (8). pp. 1-6.

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Abstract

Split-post dielectric-resonator and eddy current methods have been compared for the sheet resistance and resistivity mapping of semiconductor wafers and thin conducting films deposited on semi-insulating substrates. It has been shown that both methods give similar measurement results for the sheet resistance values that lie within their measurement ranges. Split-post dielectric-resonator and eddy current techniques can be used for measurements on samples having similar size. Measurements that employ a split-post dielectric resonator allow measurement of about three orders of magnitude larger sheet resistance values (especially for thin films) than the eddy current method but they are more complicated than the RF method and require additional microwave equipment to measure the Q-factors and the resonance frequencies.

Item ID: 19625
Item Type: Article (Refereed Research - C1)
Keywords: microwave measurements, split-post resonator, resistivity mapping, semiconductors, thin metal films, sheet resistance, conductivity
ISSN: 1361-6501
Date Deposited: 07 Feb 2012 07:05
FoR Codes: 09 ENGINEERING > 0906 Electrical and Electronic Engineering > 090699 Electrical and Electronic Engineering not elsewhere classified @ 70%
09 ENGINEERING > 0912 Materials Engineering > 091299 Materials Engineering not elsewhere classified @ 30%
SEO Codes: 86 MANUFACTURING > 8615 Instrumentation > 861503 Scientific Instruments @ 100%
Citation Count from Web of Science Web of Science 2
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