Influence of gas pressure and magnetic field upon dc magnetron discharge
Shidoji, Eiji, Ness, Kevin, and Makabe, Toshiaki (2001) Influence of gas pressure and magnetic field upon dc magnetron discharge. Vacuum, 60 (3). pp. 299-306.
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We have proposed a hybrid model for dc magnetron discharge. Simulations of the discharges under different applied voltages are performed using the hybrid model. We confirm that this hybrid model is able to predict a magnetron discharge under conditions of less than 1 Pa by comparing the results from the simulation with that from the experiment. We also perform simulations of dc magnetron discharges under conditions of different gas pressures and different magnitudes of magnetic field. In so doing, we clarify the influence of gas pressure and magnetic field upon dc magnetron discharge.
|Item Type:||Article (Refereed Research - C1)|
|Keywords:||magnetron; plasma; simulation; sputtering process|
|Date Deposited:||31 Jul 2012 07:09|
|FoR Codes:||02 PHYSICAL SCIENCES > 0202 Atomic, Molecular, Nuclear, Particle and Plasma Physics > 020204 Plasma Physics; Fusion Plasmas; Electrical Discharges @ 100%|
|SEO Codes:||97 EXPANDING KNOWLEDGE > 970102 Expanding Knowledge in the Physical Sciences @ 100%|